As introduced in Deenen, D.A., M.F. Heertjes, W.P.M.H. Heemels, and H. Nijmeijer. “Hybrid Integrator Design for Enhanced Tracking in Motion Control.” 2017 American Control Conference (ACC), May 2017, 2863–68. https://doi.org/10.23919/ACC.2017.7963385.
Reportedly used by ASML for their motion control systems.
As introduced in Deenen, D.A., M.F. Heertjes, W.P.M.H. Heemels, and H. Nijmeijer. “Hybrid Integrator Design for Enhanced Tracking in Motion Control.” 2017 American Control Conference (ACC), May 2017, 2863–68. https://doi.org/10.23919/ACC.2017.7963385.
Reportedly used by ASML for their motion control systems.